Mainly used for precise temperature control of multiple reaction chambers in semiconductor processes, the device consists of a heat exchanger, a circulating pump, a compressor, and a control system. Advanced control algorithms are used to improve the stability, temperature control accuracy, and reaction speed of the chiller. The temperature control accuracy can reach ± 0.5 ℃ under load conditions, and can be controlled arbitrarily between -20 ℃ and 85 ℃, with good temperature stability.

It mainly consists of heating circulation system, cooling system, control system, box, etc. The heating cycle system consists of a circulation pump, an electric heater, an expansion vessel, an exhaust valve, a one-way valve, a thermal resistor, and a circulation pipeline. The cooling system consists of oil-water heat exchangers, oil-oil heat exchangers (some equipment), cooling water solenoid valves, high-temperature solenoid valves, etc. The control system adopts PID control technology, high-definition touch screen display, and is equipped with multiple protection functions to ensure the safe operation of the equipment. By heating and cooling the unit itself, the heat carrying fluid is transported to the outside world to meet the requirements of the process conditions.

Provide accurate and fast ambient temperature for chips, modules, integrated circuit boards, electronic components, etc. Replacing liquid nitrogen to provide rapid cooling for local heat sources. Provide a cold source for testing the electrical performance, reliability, aging, and other aspects of the product

It mainly consists of refrigeration system, circulation system, control system, box, etc. The refrigeration system adopts steam compression refrigeration, and the compressor and main refrigeration components are all from internationally renowned brands. The circulation system consists of a circulation pump, a cold storage container, an exhaust valve, a one-way valve, a thermal resistor, pipelines, etc. The control system adopts PID control technology, high-definition touch screen display, and is equipped with multiple protection functions to ensure the safe operation of the equipment. By cooling and heating the unit itself, the heat carrying fluid is transported to the outside world to meet the requirements of the process conditions.