Liquid cooled refrigeration unit

Applied to the heating and cooling of wafer testing platforms and Chuck, using silicone oil or fluorinated liquid circulation for precise temperature control of ± 0.1 ℃. The liquid cooler mainly consists of a heating circulation system, cooling system, control system, box, etc. By heating and cooling the unit itself, the heat carrying fluid is transported to the outside world to meet the process conditions.

Equipment temperature control range: -80 ℃~200 ℃
Chuck disc control temperature: -60 ℃
Temperature stability: ± 0.1 ℃
Refrigeration system: Adopting bipolar compression refrigeration system
Customization: Customizable -60 ℃ liquid cooled refrigeration machine according to requirements

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See the parameters clearly

Model

  • Device Name
  • Refrigeration method
  • operation panel
  • Refrigerant carrier
  • Fully enclosed system
  • Medium temperature range
  • Temperature accuracy
  • Temperature feedback
  • Temperature control object
  • Display resolution
  • communication protocol
  • External input
  • Storage function
  • Condensing method
  • safety protection

Liquid cooled refrigeration unit

  • PTHC series low-temperature liquid cooler
  • Two-stage cascade refrigeration
  • 7-inch color touch screen with Chinese display, easy to operate and intuitive display, capable of displaying and recording temperature curves and test data
  • Fluoride solution or silicone oil
  • Pipeline material: SUS304, designed with a fully enclosed structure
  • -80℃ ~ 200℃
  • Exit temperature ± 0.1 ℃
  • Temperature feedback of thermal conductivity medium for equipment PT100 (return temperature, outlet temperature), controlled wafer testing Chuck disk temperature
  • Equipment thermal conductivity medium outlet temperature (material temperature can be optionally controlled)
  • 0.01K
  • MODBUS RTU protocol, RS 485 interface+Ethernet interface
  • External temperature sensor port and USB data interface
  • During the execution of the experiment, real-time graphical curves can be displayed to display the content; Set the actual temperature value, execute the program cycle, and have the function of skipping files and maintaining during program execution.
  • Air-cooled
  • Real time display of equipment operation status, automatic diagnosis of fault information, and multiple alarm protection

Product recommendations

The refrigeration and heating equipment is commonly referred to as the TCU system in the chemical industry. This mainly utilizes existing energy sources (steam, circulating water, and chilled water), integrating primary energy into a single flow system or secondary circuit for accurate temperature control of process equipment. The medium of the integrated cold and hot temperature control machine continuously conducts heat to the jacket of the reaction kettle, instead of directly controlling the temperature of the reaction kettle through steam, cooling water, and ultra-low temperature medium. The refrigeration and heating equipment automatically adjusts the temperature required for the overall reaction through big data calculation.

Primary energy applications
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Integrate existing thermal energy (such as steam, cooling water, and ultra-low temperature liquids) into a single fluid system or secondary circuit used to control the temperature of process equipment, forming a non-contact temperature control system for a single heat conduction liquid in the reaction vessel jacket

Direct TCU solution
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The TCU unit is a device specifically designed to achieve precise temperature control. It is widely used in many industrial fields, including chemical pharmaceuticals, food processing, plastic injection molding, and laboratories.

Integrated explosion-proof customized temperature control system
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With the development of the semiconductor component industry, the performance testing of various electronic components in various complex environments has become prominent. High and low temperature testing machines are specialized equipment for simulating and testing the performance of electronic components in various environments.

Component measurement and control system
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Free door-to-door delivery nationwide: The delivery time varies from 5-7 days in various provinces of northwest, northeast, and southwest. Due to uncertain factors, the delivery time in some places is more than 7 days, while in other provinces it is 3-5 days. The delivery time in Jiangsu, Zhejiang, and Shanghai is 1-2 days

We do not make any promises regarding transportation time. In the event of holidays, rain, snow, heavy fog, etc., there may be occasional delays in logistics transportation, which is beyond the manufacturer's control. Please understand.

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  • Free logistics
  • Free installation/debugging
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